Monocrystalline molybdenum silicide based quantum dot superlattices grown by chemical vapor deposition
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文摘

Molybdenum-based silicide Quantum Dot Superlattice is grown by industrial Chemical Vapor Deposition reactor.

n-type monocrystalline structure has been elaborated.

Chemical study is presented highlighting the dots formation and growth mechanisms.

Electrical and thermal properties have been measured highlighting the influence of nanostructuration.

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