Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow
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- 作者：Yu. V. Fedoseevaa ; b ; fedoseeva@niic.nsc.ru" class="auth_mail" title="E-mail the corresponding author ; G.A. Pozdnyakovc ; A.V. Okotruba ; b ; M.A. Kanygina ; b ; Yu. V. Nastaushevd ; O.Y. Vilkove ; L.G. Bulushevaa ; b
- 关键词：Oxygenated hydrocarbon films ; Supersonic plasma flow deposition ; NEXAFS ; XPS
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：1 November 2016
- 年：2016
- 卷：385
- 期：Complete
- 页码：464-471
- 全文大小：2463 K
文摘
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A deposition of supersonic methane plasma flow on silicon substrate produces amorphous oxygenated hydrocarbon (COxHy) film.
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The thickness, composition, and wettability of the film depend on the substrate temperature.
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A rise of the substrate temperature from 500 to 700 °C promotes the sp3-hybridization carbon formation.