Experiments on plasma immersion ion implantation inside conducting tubes embedded in an external magnetic field
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- 作者：E.J.D.M. Pillacaa ; mitma.elver@gmail.com" class="auth_mail" title="E-mail the corresponding author ; elver.mitma@plasma.inpe.br" class="auth_mail" title="E-mail the corresponding author ; M. Uedaa ; H. Reutherb ; L. Pichonc ; C.M. Lepienskid
- 关键词：PIII with magnetic field ; PIII inside conducting tubes ; Plasma immersion ion implantation
- 刊名：Applied Surface Science
- 出版年：2015
- 出版时间：1 December 2015
- 年：2015
- 卷：357
- 期：part_PB
- 页码：1438-1443
- 全文大小：1071 K
文摘
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Gas breakdown inside tube was preferably established above pressures of 2.0 × 10−2 mbar.
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Presence of AE inside the tube with medium diameter tube was essential to obtain a thick nitrogen layer of about 9 μm.
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Surface hardness of stainless steel was improved by about five times.