Increasing Y contents affect the as-deposited texture and lattice parameter.
Y affects relative growth rates of Al2O3 and TiO2 in oxidationexperiments.
Y leads to slower forming, more protective Al2O3 top layer.
Isotopic oxidation shows outward Al/inward O2 oxidation mechanisms as in Al-Ti-N.
SIMS shows an Al-depleted region near the unoxidized nitride.