High quality VO2 films with precisely controlled thickness were grown on p-GaN/sapphire substrates by oxide molecular beam epitaxy (O-MBE).
A distinct reversible SMT phase transition was observed for the n-VO2/p-GaN based nitride-oxide heterostructure.
The clear rectifying transport characteristics originated from the n-VO2/p-GaN interface were demonstrated before and after SMT of the VO2 over layer.
The XPS analyses confirmed the valence state of V in VO2 films was principally composed of V4+ with trace amount of V5+.
The design and modulation of the n-VO2/p-GaN based heterostructure devices will benefit significantly from these achievements.