Effect of substrate temperature on the structure, electrical and optical properties of Mo doped ZnO films
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- 作者：Guifeng Chena ; Xiaoli Zhaoa ; Hui Zhanga ; He Wanga ; Feifei Liua ; Xiaoqiang Zhanga ; Jianbo Gaob ; Yanmin Zhaoc ; Chao Zhangc ; Junguang Taoa ; taojunguang@163.com" class="auth_mail" title="E-mail the corresponding author
- 关键词：Molybdenum-doped ZnO ; Magnetron sputtering ; Transparent conductive oxides films
- 刊名：Materials Science and Engineering: B
- 出版年：2016
- 出版时间：September 2016
- 年：2016
- 卷：211
- 期：Complete
- 页码：135-140
- 全文大小：1797 K
文摘
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MZO thin films were prepared by RF magnetron sputtering from ZnO target and DC magnetron sputtering from Mo target.
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All films are polycrystalline with preferential c-axis growth.
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The various properties of films fabricated at varied substrate temperature have been studied.
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The valence of the Mo ions in the ZnO matrix is mixture of +5 and +6.