Nanotribological behaviors of organosilane monolayers prepared by the Langmuir–Blodgett (LB) and chemisorption methods are discussed in terms of their aggregation states. Aggregation structure of the LB n-octadecyltrichlorosilane (OTS-C18) monolayers changed from a rectangular to an amorphous phase via a hexagonal phase with increasing temperature. A distinct lateral force decrease accompanies the phase transition. The LB alkyltrichlorosilane monolayers with longer alkyl chains were in a crystalline state at 293K. The lateral force of the LB alkyltrichlorosilane monolayers at 293K increased with increasing chain length. The n-triacontyltrichlorosilane LB monolayer (TATS-C30) in a rectangular phase showed higher lateral force than that of the alkyltrichlorosilane with shorter alkyl chains in a hexagonal phase. The lateral force of the OTS-C18 monolayer prepared by the LB method was higher than that of the chemisorbed one because of the higher packing density of alkyl chain for the LB monolayer, though both monolayers are in a hexagonal phase at 293K. A large increase in lateral force was observed for the 18-nonadecenyltrichlorosilane (NTS) after oxidation of vinyl end groups.