ITO thin film was patterned using a femtosecond laser direct patterning technique.
The square shaped laser beam with flat-top energy distribution was carried out using a slit module.
The square shaped laser beam with pulse number control technique was applied for ablation depth control.
The ablation depth control with a resolution of 40 nm on ITO thin films was investigated using a square beam-shaped femtosecond laser.
Ablations with square and rectangular types with various sizes were demonstrated on ITO thin film.