Ablation depth control with 40 nm resolution on ITO thin films using a square, flat top beam shaped femtosecond NIR laser
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- 作者：Hoon-Young Kima ; b ; Ji-Wook Yoona ; b ; Won-Suk Choia ; b ; Kwang-Ryul Kimc ; Sung-Hak Choa ; b ; shcho@kimm.re.kr" class="auth_mail" title="E-mail the corresponding author
- 关键词：Ablation depth control ; Femtosecond laser ; Indium tin oxide (ITO) ; Beam shaping ; Transparent conducting electrode
- 刊名：Optics and Lasers in Engineering
- 出版年：2016
- 出版时间：September 2016
- 年：2016
- 卷：84
- 期：Complete
- 页码：44-50
- 全文大小：3680 K
文摘
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ITO thin film was patterned using a femtosecond laser direct patterning technique.
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The square shaped laser beam with flat-top energy distribution was carried out using a slit module.
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The square shaped laser beam with pulse number control technique was applied for ablation depth control.
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The ablation depth control with a resolution of 40 nm on ITO thin films was investigated using a square beam-shaped femtosecond laser.
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Ablations with square and rectangular types with various sizes were demonstrated on ITO thin film.