Pumping properties of Ti-Zr-Hf-V non-evaporable getter coating

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• 作者：O.B. Malyshev ; R. Valizadeh ; A.N. Hannah
• 关键词：Non-evaporable getter (NEG) ; Coating ; Activation ; Pumping ; Sticking probability
• 刊名：Vacuum
• 出版年：2014
• 出版时间：February, 2014
• 年：2014
• 卷：100
• 期：Complete
• 页码：26-28
• 全文大小：790 K

文摘

The ternary Ti-Zr-V non-evaporable getter coating is widely used on accelerator vacuum chambers in many accelerator centres. This coating can be activated at 180?¡ãC for 24?h?and has well repeatable pumping characteristics. A new quaternary Ti-Zr-Hf-V coating was deposited onto inner surface of stainless steel tubular samples. This coating can be activated at lower temperature of 150-160?¡ãC for 24?h?and has better pumping characteristics. Alike our earlier results with Ti-Zr-V coating, the Ti-Zr-Hf-V coating made with an alloy target?allows to reach higher pumping sticking probabilities and capacity than one made with a twisted wire targets.