Three-dimensional profile stitching measurement for large aspheric surface during grinding process with sub-micron accuracy
详细信息 查看全文
- 作者：Ping Yang ; yangp@xmu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Shi-wei Ye ; Yun-feng Peng
- 关键词：3D stitching measurement ; Large aspheric surface ; Sub-regions ; Alignment error ; Data matching ; Sub-micron accuracy
- 刊名：Precision Engineering
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：47
- 期：Complete
- 页码：62-71
- 全文大小：2875 K
文摘
- •
A novel measurement method based on the multiple sub-regions stitching technology is proposed to realize three-dimensional (3D) profile stitching for large aspheric surface.
- •
The sub-regions stitching measurement is applying a four-axis fixture and a commercial small-range profiler.
- •
A stitching algorithm including the multi-body theory, the invariability of curvature radiuses and the least square principle is established to reconstruct the full 3D profile.
- •
The standard deviations of stitching errors of proposed method is verified by measuring the 3D profile of an off-axis parabolic surface and an axisymmetric aspheric surface within 0.16 μm and 0.42 μm respectively.