Novel method for high accuracy figure measurement of optical flat
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- 作者：Kewei Ea ; Dahai Lia ; lidahai@scu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Lijie Yanga ; Guangrao Guoa ; Mengyang Lia ; Xuemin Wanga ; Tao Zhanga ; Zhao Xiongb
- 关键词：Metrology ; Surface measurement ; Optical flat ; Figure ; Phase measuring deflectometry
- 刊名：Optics and Lasers in Engineering
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：88
- 期：Complete
- 页码：162-166
- 全文大小：1121 K
文摘
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A backward mapping method is proposed to calculate the coordinates of flat pixels.
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A reference calibration method is adopted to remove the systematic errors.
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This technique can accurately measure the low-order aberrations of optical flat.
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The proposed technique is very simple and easy to follow.