Tribological development of TiCN coatings by adjusting the flowing rate of reactive gases
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- 作者：Wolfgang Tillmann ; wolfgang.tillmann@udo.edu" class="auth_mail" title="E-mail the corresponding author ; Soroush Momeni soroush.momeni@tu-dortmund.de" class="auth_mail" title="E-mail the corresponding author
- 关键词：Thin film ; Microstructure ; Tribology ; Reactive sputtering
- 刊名：Journal of Physics and Chemistry of Solids
- 出版年：2016
- 出版时间：March 2016
- 年：2016
- 卷：90
- 期：Complete
- 页码：45-53
- 全文大小：2733 K
文摘
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Deposition of TiCN coatings by using Ti targets as well as N2 and C2H2 reactive gases.
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Keeping constant sputtering power of Ti targets and the flowing rate of N2 reactive gas.
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Increasing the flowing rate of C2H2 reactive gas enhances the wear resistance.
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Optimum flowing rate of C2H2 reactive gas is required to enhance adhesion of coatings.