文摘
This work is to summarise briefly the history of the development of semiconductor gas sensors from the point of view of a researcher working in that field through several decades. Statistical evaluation of publication trends, literature review, device technology and theory of operation are included as well as some recent and earlier results of the author and his colleagues and friends working in the field of semiconductor gas sensors.The rapid development of material science and semiconductor technology had a strong effect on gas sensor technology in the past. This trend may be extrapolated to the future; the “More than Moore” principle will be valid in the semiconductor gas sensor field too.