Structural, mechanical properties and composition analysis of boron phosphide coatings

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• 作者：Wei Liu ; Hailing Tu ; Hai Yang ; Shuyu Zhang ; Lanqin Yan ; Chengsong Huo ; Xiaoping Su
• 关键词：Boron phosphide (BP) coatings ; Mechanical properties ; Composition analysis ; X-ray photoelectron spectroscopy
• 刊名：Journal of Alloys and Compounds
• 出版年：2012
• 出版时间：15 October, 2012
• 年：2012
• 卷：538
• 期：Complete
• 页码：169-172
• 全文大小：935 K

文摘

Boron phosphide (BP) coatings were deposited on ZnS substrate by PACVD with diborane (B₂H₆) and phosphine (PH₃) as the precursors. The XRD and SEM showed that all the BP coatings were amorphous when the PH₃ flux changed from 40 to 80 sccm. The hardness and the elastic modulus of the BP coatings decreased with the increase of PH₃ flux. The composition depth profiles of BP coatings were measured by XPS. The results showed that the ratio of P and B firstly increased and then decreased with the increase of etching time, however, no new stable compound formed across the interface between BP and ZnS.