文摘
Boron phosphide (BP) coatings were deposited on ZnS substrate by PACVD with diborane (B2H6) and phosphine (PH3) as the precursors. The XRD and SEM showed that all the BP coatings were amorphous when the PH3 flux changed from 40 to 80 sccm. The hardness and the elastic modulus of the BP coatings decreased with the increase of PH3 flux. The composition depth profiles of BP coatings were measured by XPS. The results showed that the ratio of P and B firstly increased and then decreased with the increase of etching time, however, no new stable compound formed across the interface between BP and ZnS.