Surface organic modification of inorganic substrates by plasma deposition of tin oxide organic-like thin films and grafting polymerization

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• 作者：Ko-Shao Chen ; Ming-Shu Li ; Hsin-Ming Wu ; Mu-Rong Yang ; Ji-Yan Tian ; Feng-Yi Huang and Huang-Yuan Hung
• 关键词：PECVD ; TMT and O₂ mixtures ; SnO_x organic-like films ; UV-induced grafting polymerization
• 刊名：Surface and Coatings Technology
• 出版年：2006
• 出版时间：24 February 2006
• 年：2006
• 卷：200
• 期：10
• 页码：3270-3277
• 全文大小：778 K

文摘

The plasma deposition and surface grafting polymerization have been used to modify the surface structure and properties of inorganic substrates such as organic nature, structural constitution, hydrophilicity, functional groups, and conductivity. In this study, tin oxide (SnO_x) organic-like thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) of tetramethyltin (TMT) and O₂ gas mixtures at low temperature. Higher proportion of TMT in the TMT/O₂ mixtures tends to increase organic nature of the deposited films and makes the surface hydrophobic. The organic-like thin films containing peroxides or free radicals can be subsequently grafted hydrophilic polymer acrylamide (AAm) by UV-induced grafting polymerization.