Effect of internal stress on nonlinearity and sensitivity of a pressure sensor with SiN composite diaphragm

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• 作者：Chen Zhou^a ; Yanmin Zhang^b ; Beirong Zheng^a ; Wei Xue^a ; Quan Wang^b ; ^c ; ^{wangq@mail.ujs.edu.cn}
• 关键词：Piezoresistive pressure sensor ; Internal stress ; Nonlinearity ; Sensitivity
• 刊名：Physics Letters A
• 出版年：2017
• 出版时间：30 January 2017
• 年：2017
• 卷：381
• 期：4
• 页码：284-291
• 全文大小：2466 K
• 卷排序：381

文摘

The ultra-compact sensor has a sensing diaphragm geometry of only 360 μm×80 μm360 μm×80 μm. A modeling is presented to predict the nonlinearity of a pressure sensor with varied film internal stresses. Analytical models based on small- and large-deflection theories are applied to predict the nonlinearity of the pressure sensor. Internal stress in the film can improve the linearity of the pressure sensor by lowering the sensitivity.