Effects of gas pressure on microstructure and performance of (Ti, Al, Zr)N coatings produced by physical vapor deposition

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• 作者：Wei Liu ; ^{317127238@qq.com" class="auth_mail" title="E-mail the corresponding author} ; Anqiong Li ; Haidong Wu ; Ying Long ; Jiawei Huang ; Xin Deng ; Chengyong Wang ; Qimin Wang ; Shanghua Wu ; ^{swu@gdut.edu.cn" class="auth_mail" title="E-mail the corresponding author}
• 关键词：C. Mechanical properties ; D. Nitrides ; E ; Structural applications ; Coating
• 刊名：Ceramics International
• 出版年：2016
• 出版时间：15 November 2016
• 年：2016
• 卷：42
• 期：15
• 页码：17436-17441
• 全文大小：1693 K

文摘

In this study, a novel quaternary (Ti, Al, Zr)N coating was successfully fabricated via multi-arc ion plating technique on the Si₃N₄ ceramic substrate. A series of (Ti, Al, Zr)N coatings were produced on the silicon nitride (Si₃N₄) cutting tools by multi-arc ion plating technique using a combination of AlTi, pure Ti, and pure Zr targets. The effects of gas pressure on microstructure, deposition rate, coating thickness, phase constitution, mechanical properties, cutting performance, and wear mechanism of (Ti, Al, Zr)N coatings were systematically investigated by using four gas pressure values: 1.5, 2.0, 2.5, and 3.0 Pa during the coating preparation process. It was observed from the flank worn surface that the main wear mechanism of the (Ti, Al, Zr)N coated Si₃N₄ cutting tools produced at different gas pressures was adhesion wear. At 1.5 and 3.0 Pa, coating spalling occurred. When the gas pressure was 2.5 Pa, the wear transition zone at the flank surface was obvious, which was confirmed to be positive toward the cutting performance of the cutting tools.