Microstructure, mechanical property and thermal stability of diamond-like carbon coatings with Al, Cr and Si multi-doping

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• 作者：Wei Dai ; ^{popdw@126.com} ; Xiang Gao ; Jingmao Liu ; Qimin Wang ; ^{qmwang@gdut.edu.cn}
• 关键词：Diamond-like carbon ; AlCrSi multi -doping ; Stress ; Thermal stability
• 刊名：Diamond and Related Materials
• 出版年：2016
• 出版时间：November 2016
• 年：2016
• 卷：70
• 期：Complete
• 页码：98-104
• 全文大小：1685 K
• 卷排序：70

文摘

AlCrSi-DLC coatings were deposited by using a high power impulse magnetron sputtering. AlCrSi multi-doping can greatly improve the coating residual stress (0.8 GPa) and elastic recovery (50%). AlCrSi-DLC coatings showed a high thermal stability over 500 °C.