Multiscale modeling and run-to-run control of PECVD of thin film solar cells
详细信息 查看全文
- 作者：Marquis Crose<sup>asup> ; Joseph Sang-Il Kwon<sup>csup> ; Anh Tran<sup>asup> ; Panagiotis D. Christofides<sup>bsup><sup> ; sup><sup>asup><sup> ; sup><sup>pdc@seas.ucla.edu" class="auth_mail" title="E-mail the corresponding authorsup>
- 关键词：Process modeling ; Plasma-enhanced chemical vapor deposition ; Thin film solar cells ; Multiscale modeling ; Parallel computing ; Run-to-run control
- 刊名：Renewable Energy
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：100
- 期：Complete
- 页码：129-140
- 全文大小：1363 K
文摘
- •
Multiscale modeling of the evolution of gas phase species and film thickness and surface morphology.
- •
Parallel computation for efficient solution of multiscale model.
- •
Run-ton-run control for reduction of reactor drift on film properties.
- •
Manufacturing of thin films with desired film thickness and surface morphology.