Damage-free and atomically precise surface preparation of SrTiO3
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- 作者：Yong Su Kim ; yongsu12.kim@samsung.com" class="auth_mail" title="E-mail the corresponding author ; Dong Jin Yun ; Seong Heon Kim ; Yong Koo Kyoung ; Sung Heo
- 关键词：Oxider surface and interface ; SrTiO3 ; XPS ; GCIB
- 刊名：Current Applied Physics
- 出版年：2016
- 出版时间：November 2016
- 年：2016
- 卷：16
- 期：11
- 页码：1464-1467
- 全文大小：982 K
文摘
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Sputtering technique for preparation of high-quality oxide surface is presented.
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SrTiO3 (001), prototype perovskite oxide is utilized and fabricated.
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Contaminants- and damage-free oxide surface is prepared.
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Preparation process for atomically precise surface and interface fabrication.