LiPON thin films with high nitrogen content for application in lithium batteries and electrochromic devices prepared by RF magnetron sputtering
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- 作者：Yurong Sua ; Yurong.Su@exp1.physik.uni-giessen.de" class="auth_mail" title="E-mail the corresponding author ; Jane Falgenhauerb ; Angelika Politya ; Angelika.Polity@exp1.physik.uni-giessen.de" class="auth_mail" title="E-mail the corresponding author ; Thomas Leichtweiß ; c ; Achim Kronenbergerc ; Jaroslava Obeld ; Shengqiang Zhoue ; Derck Schlettweinb ; Jü ; rgen Janekc ; Bruno K. Meyera
- 关键词：LiPON ; Lithium solid electrolyte ; Solid state battery ; Electrochromic device
- 刊名：Solid State Ionics
- 出版年：2015
- 出版时间：1 December 2015
- 年：2015
- 卷：282
- 期：Complete
- 页码：63-69
- 全文大小：960 K
文摘
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Thorough study on electronic properties on LiPON films with high nitrogen content prepared by RF sputtering has been done.
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The optical properties of LiPON were studied and the possibility for using in electrochromic device is discussed.
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The deposition rate of LiPON films is around 14 nm/min instead of 1–5 nm/min usually reported in the literature.
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The methods for determination of composition are discussed.
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The correlation between composition, local structure and ionic conductivity is discussed.