Fabrication and calibration of Pt-10%Rh/Pt thin film thermocouples

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• 作者：Yinzhi Chen ; Hongchuan Jiang ; Wenya Zhao ; Wanli Zhang ; Xingzhao Liu ; Shuwen Jiang
• 关键词：Thin film thermocouples ; Calibrating ; Seebeck coefficient ; Anneal ; Relative sensitive coefficient
• 刊名：Measurement
• 出版年：February, 2014
• 年：2014
• 卷：48
• 期：Complete
• 页码：248-251
• 全文大小：571 K

文摘

Platinum-10% rhodium vs. platinum thin film thermocouples with multi-layer structure were prepared on the nickel based superalloy substrates. The samples were calibrated in a thermocouple calibrating furnace in temperature range from 200 掳C to 950 掳C. The influences of anneal on the Seebeck coefficient and the relative sensitivity coefficient were investigated in detail. The results show that the Seebeck coefficient of the samples annealed in air is degenerated from 7.7 渭V/掳C down to 7.32 渭V/掳C and the sensitive coefficient is degenerated from 0.742 to 0.647 in average. However, the samples annealed in vacuum is improved from 7.7 渭V/掳C to 8.28 渭V/掳C and the sensitive coefficient is improved from 0.742 to 0.911 in average. The error was limited to 11 掳C from 200 掳C to 1000 掳C. The loss efficacy time of all the samples is less than 20 h in our test condition.