Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system
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- 作者：So Itoa ; so.ito@nano.mech.tohoku.ac.jp" class="auth_mail" title="E-mail the corresponding author ; Yuan-Liu Chena ; Yuki Shimizua ; Hirotaka Kikuchia ; Wei Gaoa ; Kazuhiko Takahashib ; Toshihiko Kanayamab ; Kunmei Arakawab ; Atsushi Hayashib
- 关键词：Metrology ; Probe ; Force
- 刊名：Precision Engineering
- 出版年：2016
- 出版时间：January 2016
- 年：2016
- 卷：43
- 期：Complete
- 页码：525-529
- 全文大小：932 K
文摘
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A shear-mode vibrating probe, which can detect the interaction force due to the water layer on the measurement surface, has been utilized as a touch trigger probe for the gap width measurement of micro-slit of the slot die coater.
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The high sensitive micro-probing system has been applied for the gap width measurement of precision slot die coater with a nominal gap width of 90 μm.
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On-line qualification of probe tip ball diameter setup was carried out to reduce the uncertainty source.
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The associated expanded uncertainty of measurement was 78.3 nm (k = 2), which has satisfied the requirement for quality control of manufacturing precision slot dies from industries.