The influence of landing points on the sputtering of mono-crystal solids due to cluster impacting

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• 作者：Guo-jian Niu ; Xiao-chun Li ; Qian Xu ; Zhong-shi Yang ; ^{zsyang@ipp.ac.cn} ; Guang-nan Luo ; ^{gnluo@ipp.ac.cn}
• 关键词：Sputtering ; Cluster ; Mechanism ; Molecular dynamics
• 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 出版年：2017
• 出版时间：15 January 2017
• 年：2017
• 卷：391
• 期：Complete
• 页码：52-56
• 全文大小：1020 K
• 卷排序：391

文摘

The mechanism of sputtering due to cluster impacting which has been widely studied is an important but unsolved problem. In present research, we discuss the effect of the landing point on the sputtering with the method of molecular dynamics. The results show that the landing points play significant roles on sputter yield when the temperature of target is low. Specific landing points can cause particular sputtering patterns which lead to different sputtering yield and moving directions of sputtered atoms. The mechanism of this phenomenon is that specific landing keeps symmetries and anisotropies of target lattice, which influence the sputtering yield.