Thickness dependence of electrical and piezoelectric properties of ferroelectric Ba_0.8Sr_0.2TiO₃ thin films

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• 作者：D.A. Kiselev^a ; ^b ; ^{dm.kiselev@gmail.com} ; M.S. Afanasiev^b ; S.A. Levashov^b ; A.A. Sivov^b ; G.V. Chucheva^b
• 关键词：Lead-free ; Barium strontium titanate film ; Ferroelectric ; Polarization switching ; Piezoresponse force microscopy
• 刊名：Thin Solid Films
• 出版年：2016
• 出版时间：30 November 2016
• 年：2016
• 卷：619
• 期：Complete
• 页码：214-219
• 全文大小：1034 K
• 卷排序：619

文摘

Polycrystalline ferroelectric BST 80/20 film grown on Si(100) by RF-sputtering. Thickness of the films varied between 150 nm and 550 nm. Structural, electrical and piezoelectric properties of the films are presented. Memory window, piezoelectric constant d33 and remnant piezoresponse vary with thickness. d33 obtained for BST 80/20 films comparable to that reported in literature.