Fabrication and characterization of MEMS cantilever array for switching applications
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- 作者：Deepak G. Khushalania ; khushalanidg@rknec.edu" class="auth_mail" title="E-mail the corresponding author ; Rajesh S. Pandea ; panders@rknec.edu" class="auth_mail" title="E-mail the corresponding author ; Rajendra M. Patrikarb ; rajendra@computer.org" class="auth_mail" title="E-mail the corresponding author
- 关键词：MEMS ; Cantilever ; Current ; Switch matrix
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：1 May 2016
- 年：2016
- 卷：157
- 期：Complete
- 页码：78-82
- 全文大小：1075 K
文摘
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Increasing the current handling capacity of cantilever switches.
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Batch Fabrication – Cantilever Array.
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Performance analysis based on our previous finding "reference 4".
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Power - 10 mW for single beam.
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Testing of these devices is done to ascertain the enhancement in full power handling potential (Current capacity).