Effect of nitrogen pressure on mechanical properties of nc-TiAlN/a-Si₃N₄ nanocomposite coatings deposited by cathodic arc PVD process

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• 作者：N. Ravi^a ; ^{nravi@arci.res.in" class="auth_mail" title="E-mail the corresponding author} ; R. Markandeya^b ; S. V. Joshi^a ; ^c
• 关键词：Nanocomposite ; TiAlSiN ; nc-TiAlN/a-Si3N4 ; Nitrogen pressure ; Cathodic arc PVD ; Cylindrical cathode
• 刊名：Materials Today: Proceedings
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：3
• 期：9
• 页码：3002-3011
• 全文大小：745 K

文摘

The present work investigates effect of nitrogen pressure on composition and mechanical properties of superhard nc-TiAlN/a-Si₃N₄ nanocomposite coatings deposited by cathodic arc PVD process. As the nitrogen pressure increases, at.% ratio of (Al+Si)/Ti, initially, increases to a maximum and thereafter, it decreases while the nitrogen content follows the reverse trend. Hardness is influenced by chemical composition and crystallite size of TiAlN phase. Maximum average hardness of 37 GPa is achieved when at.% ratio of Al(+Si)/Ti or N/(Ti+Al+Si) approaches 1.0 and decrease in scratch adhesion strength is attributed to the defects caused by nitrogen deficiency.