Arrays of metallic nanocones fabricated by UV-nanoimprint lithography

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• 作者：Juha M. Kontio ; Janne Simonen ; Juha Tommila ; Markus Pessa
• 关键词：Nanocone ; Cones ; Gold ; Optical antenna ; Nanoimprint lithography ; Second-harmonic generation ; Field emission
• 刊名：Microelectronic Engineering
• 出版年：2010
• 出版时间：November 2010
• 年：2010
• 卷：87
• 期：9
• 页码：1711-1715
• 全文大小：493 K

文摘

We introduce a novel method for fabricating nanocones of various metals. Based on a combination of UV-nanoimprint lithography and electron beam evaporation, the method enables fast, high volume, and reproducible fabrication of conical nanostructures on flat substrates. We investigate cone formation with eight different metals and find that the shape of the cone depends on the material characteristics of the deposited metal.