F-DLC films deposited by direct mode and remote mode PECVD. Antibacterial activity and cell viability were studied on F-DLC coated polycarbonate (PC) substrates. Deposited F-DLC films got hydrophobic due to incorporation of CFn groups in the films. F-DLC films exhibit no toxicity for HS5 stromal cell and acceptable antibacterial activity against E.Coli. Evaluate effects of direct mode and remote mode methods on antibacterial properties of F-DLC films.