Reduction in thickness error of optical coatings by dividing thick layers and monitoring with multiple witness glasses

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• 作者：Meiping Zhu ; ^{bree@siom.ac.cn} ; Kui Yi ; Ying Du ; Hongji Qi ; Weili Zhang ; Jianda Shao
• 关键词：Monitoring ; Optical coatings ; Thickness error
• 刊名：Vacuum
• 出版年：2013
• 出版时间：November, 2013
• 年：2013
• 卷：97
• 期：Complete
• 页码：44-48
• 全文大小：1017 K

文摘

We present a monitoring strategy based on using two pieces of witness glass, which are brought to the measuring position in a specially chosen sequence, each witness glass is monitored by one single wavelength. To reduce the thickness error, some thick layers are divided into two layers and monitored by different witness glasses. Theoretical analysis and experimental results have demonstrated that the proposed monitoring strategy can achieve spectral performance close to the theoretical design.