Modification of DLC films by Ni⁺ ions implantation

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• 作者：Lizhao Qin ; Zhenglong Wu ; Xu Zhang ; Andong Liu ; Bin Liao ; Jie Deng
• 关键词：Ion implantation ; Diamond-like carbon (DLC) films ; Ni-doping
• 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 出版年：2008
• 出版时间：September 2008
• 年：2008
• 卷：266
• 期：18
• 页码：3939-3944
• 全文大小：1279 K

文摘

Enhanced diamond-like carbon (DLC) multilayer films were produced by a method of alternating the magnetic filtered vacuum cathode arc deposition and the metal vapor vacuum arc (MEVVA) implantation of Ni⁺ ions. The microstructure and mechanical properties of these multilayer films were studied by XPS, Raman, SEM, AFM, XRD, nano-intender and internal stress measurement. The results reveal that with the increasing dose of implanted Ni⁺ ions, the sp³ contents are declining and reduction of the nanohardness and release of the internal stress are observed.