Vapor Pressures of (3-(Dimethylamino)propyl)dimethylindium, (tert-Butylimino)bis(diethylamino)cyclopentadienyltantalum, and (tert-Butylimino)tris(ethylmethylamino)tantalum
文摘
Vapor pressures of three metalorganic precursors, (3-(dimethylamino)propyl)dimethylindium (CAS RN 120441-9201, [Me2N(CH2)3]Me2In), (tert-butylimino)bis(diethylamino)cyclopentadienyltantalum (CAS RN 852212-55-6, (t-BuN)(Et2N)2CpTa), and (tert-butylimino)tris(ethylmethylamino)tantalum (CAS RN 511292-99-2, (t-BuN)(EtMeN)3Ta) were measured using the static method in the temperature range (268 to 323) K. The experimental data were fitted with the Antoine equation. To our knowledge, this is the first study reporting the vapor pressure measurements for (t-BuN)(Et2N)2CpTa and (t-BuN)(EtMeN)3Ta. Fragmentary information on vapor pressure data for [Me2N(CH2)3]Me2In found in the literature are not in accordance with our measurements.