Integration of Self-Assembled Three-Dimensional Photonic Crystals onto Structured Silicon Wafers

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• 作者：Jianhui Ye ; Rudolf Zentel ; Sanna Arpiainen ; Jouni Ahopelto ; Fredrik Jonsson ; Sergei G. Romanov ; Clivia M. Sotomayor Torres
• 刊名：Langmuir
• 出版年：2006
• 出版时间：August 15, 2006
• 年：2006
• 卷：22
• 期：17
• 页码：7378 - 7383
• 全文大小：1086K
• 年卷期：v.22,no.17(August 15, 2006)
• ISSN：1520-5827

文摘

We report on the fabrication of high-quality opaline photonic crystals from large silica spheres (diameter of 890nm), self-assembled in hydrophilic trenches of silicon wafers by using a novel technique coined a combination of"lifting and stirring". The achievements reported here comprise a spatial selectivity of opal crystallization withoutspecial treatment of the wafer surface, a filling of the trenches up to the top, leading to a spatially uniform filmthickness, particularly an absence of cracks within the size of the trenches, and finally a good 3D order of the opallattice even in trenches with a complex confined geometry, verified using optical measurements. The opal lattice wasfound to match the pattern precisely in width as well as depth, providing an important step toward applications ofopals in integrated optics.