Characterization of Nanomechanical, Ferroelectric, and Piezoelectric Properties by Nanoindentation and Piezoresponse Force Microscopy of PbTiO3 Thin Films

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• 作者：Juan Ramos-Cano ; Mario Miki-Yoshida ; Andr茅 Marino Gon莽alves ; Jos茅 Ant么nio Eiras ; Jes煤s Gonz谩lez-Hern谩ndez ; Jos茅 Antonio Rodr铆guez-L贸pez ; Patricia Am茅zaga-Madrid ; Abel Hurtado-Mac铆as
• 刊名：Industrial & Engineering Chemistry Research
• 出版年：2013
• 出版时间：October 9, 2013
• 年：2013
• 卷：52
• 期：40
• 页码：14328-14334
• 全文大小：434K
• 年卷期：v.52,no.40(October 9, 2013)
• ISSN：1520-5045

文摘

Lead titanate PbTiO₃ films were deposited onto Pt(111)/Ti/SiO₂/Si(100) substrates by the aerosol assisted chemical vapor deposition (AA-CVD) process followed by thermal annealing at 550 掳C for 12 h. Piezoresponse force microscopic observations revealed a nano laminar domain structure in the PbTiO₃ grains, and we attribute the lamellar domains to 180 and 90掳 ferroelectric domains. The polarization-switching mechanism of the domains in the representative PbTiO₃ film under an external electric fields has also been studied, and it was revealed that a large-area polarization switching is usually accompanied by the appearance of a new direction of 90掳 domains in order to reduce the stress in the grains. Finally, nanomechanical properties such as the elastic modulus and hardness were evaluated by nanoindentation using the continuous stiffness measurement technique.