Water-Assisted Growth of Uniform 100 mm Diameter SWCNT Arrays

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• 作者：Roman M. Wyss ; Jennifer E. Klare ; Hyung Gyu Park ; Aleksandr Noy ; Olgica Bakajin ; Valentin Lulevich
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2014
• 出版时间：December 10, 2014
• 年：2014
• 卷：6
• 期：23
• 页码：21019-21025
• 全文大小：319K
• ISSN：1944-8252

文摘

We report a simple method for growing high-quality single-walled carbon nanotube (SWCNT) arrays on 100 mm wafers via the addition of water vapor to highly purified gases during the CNT growth step. We show that adding a small amount of water during growth helps to create a uniform catalyst distribution and yields high-quality (Raman G/D of 26 卤 3), high-density (up to 6 脳 10¹¹ cm^鈥?) and uniform SWCNT arrays on 100 mm large wafers. We rationalize our finding by suggesting that the addition of water decreases catalyst mobility, preventing its coarsening at higher temperatures. We also report a new mechanism of catalyst inactivation in wafer-scale growth using ultrapurified gas sources by the formation of large, 5 卤 3 渭m iron particles. We found such formations to be common for substrates with large temperature gradients, such as for wafers processed in a typical cold-wall chemical vapor deposition reactor.

Keywords:

aligned SWCNT array; wafer scale CNT synthesis; water assisted SWCNT growth; catalyst ripening; catalyst mobility; catalyst inactivation