Surface Hydride Composition of Plasma-Synthesized Si Nanoparticles

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• 作者：Bhavin N. Jariwala ; Nicolaas J. Kramer ; M. Cristina Petcu ; David C. Bobela ; M. C. M. van de Sanden ; Paul Stradins ; Cristian V. Ciobanu ; Sumit Agarwal
• 刊名：Journal of Physical Chemistry C
• 出版年：2011
• 出版时间：October 27, 2011
• 年：2011
• 卷：115
• 期：42
• 页码：20375-20379
• 全文大小：806K
• 年卷期：v.115,no.42(October 27, 2011)
• ISSN：1932-7455

文摘

We have determined the surface hydride composition of amorphous and crystalline Si nanoparticles (NPs) (3鈥? nm) synthesized in a low-temperature SiH₄/Ar plasma using in situ attenuated total reflection Fourier-transform infrared spectroscopy and H₂ thermal effusion measurements. With increasing power to the plasma source, the particles transition from amorphous to crystalline with a corresponding increase in the fraction of SiH species on the surface. The surface hydride composition indicates that Si NPs synthesized at higher plasma powers crystallize in the gas-phase due to a greater degree of plasma-induced heating, which enhances the desorption rates for SiH₂ and SiH₃. Furthermore, these Si NPs do not contain any detectable H in the bulk.