Gold Contamination in VLS-Grown Si Nanowires: Multiwavelength Anomalous Diffraction Investigations
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- 作者：Ludovic Dupr茅 ; Denis Buttard ; C茅dric Leclere ; Hubert Renevier ; Pascal Gentile
- 刊名：Chemistry of Materials
- 出版年：2012
- 出版时间：December 11, 2012
- 年：2012
- 卷：24
- 期：23
- 页码：4511-4516
- 全文大小：333K
- 年卷期：v.24,no.23(December 11, 2012)
- ISSN：1520-5002
文摘
Silicon nanowires were grown by gold-catalyzed chemical vapor deposition in the vapor liquid solid mode. In this paper, we use grazing incidence X-ray diffraction and multiwavelength anomalous diffraction to investigate the presence of gold and its effects on silicon nanowire strain after different chemical and physical treatments. We especially focus on the efficiency of the 鈥渢hermal oxidation鈥搊xide etching鈥?cycle to remove the gold contamination. Analysis reveals a decrease of the contamination and a 鈥渃ore鈥搒hell like鈥?spatial distribution of gold, but also shows that this technique is not efficient enough to remove all traces of gold from the nanowires.