Real-Time Shape Evolution of Nanoimprinted Polymer Structures during Thermal Annealing

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• 作者：Ronald L. Jones ; Tengjiao Hu ; Christopher L. Soles ; Eric K. Lin ; Ronald M. Reano ; Stella W. Pang ; Diego M. Casa
• 刊名：Nano Letters
• 出版年：2006
• 出版时间：August 2006
• 年：2006
• 卷：6
• 期：8
• 页码：1723 - 1728
• 全文大小：216K
• 年卷期：v.6,no.8(August 2006)
• ISSN：1530-6992

文摘

The real-time shape evolution of nanoimprinted polymer patterns is measured as a function of annealing time and temperature using criticaldimension small-angle X-ray scattering (CD-SAXS). Periodicity, line width, line height, and sidewall angle are reported with nanometer resolutionfor parallel line/space patterns in poly(methyl methacrylate) (PMMA) both below and above the bulk glass transition temperature (T_G). Heatingthese patterns below T_G does not produce significant thermal expansion, at least to within the resolution of the measurement. However, aboveT_G the fast rate of loss in pattern size at early times transitions to a reduced rate in longer time regimes. The time-dependent rate of polymerflow from the pattern into the underlying layer, termed pattern "melting", is consistent with a model of elastic recovery from stresses inducedby the molding process.