Printed Sub-100 nm Polymer-Derived Ceramic Structures
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- 作者：Binh Duong ; Palash Gangopadhyay ; Josh Brent ; Supapan Seraphin ; Raouf O. Loutfy ; Nasser Peyghambarian ; Jayan Thomas
- 刊名：ACS Applied Materials & Interfaces
- 出版年：2013
- 出版时间：May 8, 2013
- 年：2013
- 卷：5
- 期：9
- 页码：3894-3899
- 全文大小：425K
- 年卷期：v.5,no.9(May 8, 2013)
- ISSN：1944-8252
文摘
We proposed an unconventional fabrication technique called spin-on nanoprinting (SNAP) to generate and transfer sub-100 nm preceramic polymer patterns onto flexible and rigid substrates. The dimensions of printed nanostructures are almost the same as those of the mold, since the ceramic precursor used is a liquid. The printed patterns can be used as a replica for printing second-generation structures using other polymeric materials or they can be further converted to desirable ceramic structures, which are very attractive for high-temperature and harsh environment applications. SNAP is an inexpensive parallel process and requires no special equipment for operation.