Precise Nanoscale Surface Modification and Coating of Macroscale Objects: Open-Environment in Loco Atomic Layer Deposition on an Automobile

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• 作者：Moataz Bellah M. Mousa ; Christopher J. Oldham ; Gregory N. Parsons
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2015
• 出版时间：September 9, 2015
• 年：2015
• 卷：7
• 期：35
• 页码：19523-19529
• 全文大小：365K
• ISSN：1944-8252

文摘

The fundamental chemical reaction conditions that define atomic layer deposition (ALD) can be achieved in an open environment on a macroscale surface too large and complex for typical laboratory reactor-based ALD. We describe the concept of in loco ALD using conventional modulated reactant flow through a surface-mounted 鈥淎LD delivery head鈥?to form a precise nanoscale Al₂O₃ film on the window of a parked automobile. Analysis confirms that the processes eliminated ambient water contamination and met other conditions that define ALD growth. Using this tool, we demonstrate open-ambient patterned deposition, metal corrosion protection, and polymer surface modification.