Nanowire Arrays in Multicrystalline Silicon Thin Films on Glass: A Promising Material for Research and Applications in Nanotechnology
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- 作者：Sebastian W. Schmitt ; Florian Schechtel ; Daniel Amkreutz ; Muhammad Bashouti ; Sanjay K. Srivastava ; Bj枚rn Hoffmann ; Christel Dieker ; Erdmann Spiecker ; Bernd Rech ; Silke H. Christiansen
- 刊名：Nano Letters
- 出版年：2012
- 出版时间：August 8, 2012
- 年：2012
- 卷：12
- 期：8
- 页码：4050-4054
- 全文大小：331K
- 年卷期：v.12,no.8(August 8, 2012)
- ISSN：1530-6992
文摘
Silicon nanowires (SiNW) were formed on large grained, electron-beam crystallized silicon (Si) thin films of only 6 渭m thickness on glass using nanosphere lithography (NSL) in combination with reactive ion etching (RIE). Electron backscatter diffraction (EBSD) and transmission electron microscopy (TEM) studies revealed outstanding structural properties of this nanomaterial. It could be shown that SiNWs with entirely predetermined shapes including lengths, diameters and spacings and straight side walls form independently of their crystalline orientation and arrange in ordered arrays on glass. Furthermore, for the first time grain boundaries could be observed in individual, straightly etched SiNWs. After heat treatment an electronic grade surface quality of the SiNWs could be shown by X-ray photoelectron spectroscopy (XPS). Integrating sphere measurements show that SiNW patterning of the multicrystalline Si (mc-Si) starting thin film on glass substantially increases absorption and reduces reflection, as being desired for an application in thin film photovoltaics (PV). The multicrystalline SiNWs directly mark a starting point for research not only in PV but also in other areas like nanoelectronics, surface functionalization, and nanomechanics.