Binary Pt–Si Nanostructures Prepared by Focused Electron-Beam-Induced Deposition

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• 作者：Marcel Winhold ; Christian H. Schwalb ; Fabrizio Porrati ; Roland Sachser ; Achilleas S. Frangakis ; Britta Kämpken ; Andreas Terfort ; Norbert Auner ; Michael Huth
• 刊名：ACS Nano
• 出版年：2011
• 出版时间：December 27, 2011
• 年：2011
• 卷：5
• 期：12
• 页码：9675-9681
• 全文大小：934K
• 年卷期：0
• ISSN：1936-086X

文摘

Binary systems of Pt–Si are prepared by electron-beam-induced deposition using the two precursors, trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPt(Me)₃) and neopentasilane (Si(SiH₃)₄), simultaneously. By varying the relative flux of the two precursors during deposition, we are able to study composites containing platinum and silicon in different ratios by means of energy-dispersive X-ray spectroscopy, atomic force microscopy, electrical transport measurements, and transmission electron microscopy. The results show strong evidence for the formation of a binary, metastable Pt₂Si₃ phase, leading to a maximum in the conductivity for a Si/Pt ratio of 3:2.