文摘
The advantages of microanalyzers, usually fabricated insilicon, glass, or polymers, are well-known. The designand construction of fluidic platforms are well-developedareas due to the perfectly established microfabricationtechnologies used. However, there is still the need toachieve devices that include not only the fluid management system but also the measurement electronics, sothat real portable miniaturized analyzers can be obtained.Low-temperature co-fired ceramics technology permits theincorporation of actuators, such as micropumps andmicrovalves, controlled either magnetically, piezoelectrically, or thermally. Furthermore, electronic circuits canbe also easily built exploiting the properties of theseceramics and the fact that they can be fabricated using amultilayer approach. In this work, taking advantage of thepossibility of combining fluidics and electronics in a singlesubstrate and using the same fabrication methodology, achemical microanalyzer that integrates microfluidics, thedetection system, and also the data acquisition and digitalsignal processing electronics is presented. To demonstrate the versatility of the technology, two alternativesetups have been developed. In the first one, a modularconfiguration is proposed. In this case, the same electronic module can be used to determine different chemicalparameters by simply exchanging the chemical module.In the second one, the monolithic integration of all theelements was accomplished, allowing the construction ofcompact and dedicated devices. Chloride ion microanalyzers have been constructed to demonstrate the operability of both device configurations. In all cases, theresults obtained showed adequate analytical features.