Wafer Scale Formation of Monocrystalline Silicon-Based Mie Resonators via Silicon-on-Insulator Dewetting
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- 作者：Marco Abbarchi ; Meher Naffouti ; Benjamin Vial ; Abdelmalek Benkouider ; Laurent Lermusiaux ; Luc Favre ; Antoine Ronda ; S茅bastien Bidault ; Isabelle Berbezier ; Nicolas Bonod
- 刊名：ACS Nano
- 出版年：2014
- 出版时间：November 25, 2014
- 年：2014
- 卷：8
- 期：11
- 页码：11181-11190
- 全文大小：1819K
- ISSN：1936-086X
文摘
Subwavelength-sized dielectric Mie resonators have recently emerged as a promising photonic platform, as they combine the advantages of dielectric microstructures and metallic nanoparticles supporting surface plasmon polaritons. Here, we report the capabilities of a dewetting-based process, independent of the sample size, to fabricate Si-based resonators over large scales starting from commercial silicon-on-insulator (SOI) substrates. Spontaneous dewetting is shown to allow the production of monocrystalline Mie-resonators that feature two resonant modes in the visible spectrum, as observed in confocal scattering spectroscopy. Homogeneous scattering responses and improved spatial ordering of the Si-based resonators are observed when dewetting is assisted by electron beam lithography. Finally, exploiting different thermal agglomeration regimes, we highlight the versatility of this technique, which, when assisted by focused ion beam nanopatterning, produces monocrystalline nanocrystals with ad hoc size, position, and organization in complex multimers.