MEMS Tunable Mid-Infrared Plasmonic Spectrometer

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• 作者：Thomas Stark ; Matthias Imboden ; Sabri Kaya ; Alket Mertiri ; Jackson Chang ; Shyamsunder Erramilli ; David Bishop
• 刊名：ACS Photonics
• 出版年：2016
• 出版时间：January 20, 2016
• 年：2016
• 卷：3
• 期：1
• 页码：14-19
• 全文大小：585K
• ISSN：2330-4022

文摘

We present a microelectromechanical systems (MEMS) tunable metamaterial, Fabry-Pérot interferometer with a widely tunable mid-infrared response. An array of subwavelength holes in a gold film is suspended above a gold reflector, forming an interferometer cavity whose length can be modulated over a range of 1.7 to 21.67 μm using MEMS electrostatic actuation. Reflectance spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Pérot resonances with free spectral ranges from 2900 to 230.7 cm^–1. Measuring the free spectral range enables us to perform in situ interferometric calibration of the cavity length. We present a simple analytical model that describes the experimental and simulated results. This device shows promise as a surface-enhanced sensing substrate with a tunable spectral response.