T
he new Cu/SiO
2 catalyst is developed by t
he atomic layer epitaxy (ALE) met
hod. T
he ALE-Cu/SiO
2 catalyst wit
h hig
h dispersion and nanoscale Cu particles appears to
have very different catalytic properties from t
hose of t
he typical Cu-based catalysts, w
hic
h have satisfactory t
hermal stability to resist t
he sintering of Cu particles at 773 K. Due to t
he formation of small Cu particles, t
he ALE-Cu/SiO
2 can strongly bind CO and give
hig
h catalytic activity for CO
2 converted to CO in t
he reverse water-gas-s
hift reaction. T
he catalytic activity decreases in t
he order of 2.4% ALE-Cu/SiO
2 ![](/images/entities/eDot.gif)
2% Pt/SiO
2 > 2% Pd/SiO
2 ![](/images/entities/Gt.gif)
10.3% IM-Cu/SiO
2.