A copper-phthalocyanine (CuPc) thin film was heteroepitaxially grown by the organic molecular beamepitaxy method at 200
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C on an indium-tin oxide (ITO) film with an atomically flat terraced and stepped surface.Two different epitaxial domains with a 6-fold symmetry of CuPc were grown on the ITO substrate with relationshipsof (100){001}CuPc
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(111){112}ITO (major domain) and (100){001}CuPc
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(111){110}ITO (minor domain). Theorientation of the major domain was better than that of the minor domain. The difference in orientation may beunderstood by considering geometrical matching between the CuPc molecules and the ITO surface.