文摘
The recently developed 3D micro X-ray fluorescencespectroscopy (3D Micro-XRF) enables three-dimensionalresolved, nondestructive investigation of elemental distribution in samples in the micrometer regime. Establishing a reliable quantification procedure is the preconditionto render this spectroscopic method into a true analyticaltool. One prominent field of application is the investigationof stratified material. A procedure for the quantitativereconstruction of the composition of stratified material bymeans of 3D Micro-XRF is proposed and validated. Withthe procedure, it is now possible to determine nondestructively the chemical composition and the thicknessof layers. As no adequate stratified reference sampleswere available for validation, stratified reference materialhas been developed that is appropriate for 3D Micro-XRFor other depth-sensitive X-ray techniques.