Oriented Film Growth of Ba1鈥?i>xSrxTiO3 Dielectrics on Glass Substrates Using 2D Nanosheet Seed Layer

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• 作者：Chulho Jung ; Tsuyoshi Ohnishi ; Minoru Osada ; Kazunori Takada ; Takayoshi Sasaki
• 刊名：ACS Applied Materials & Interfaces
• 出版年：2013
• 出版时间：June 12, 2013
• 年：2013
• 卷：5
• 期：11
• 页码：4592-4596
• 全文大小：284K
• 年卷期：v.5,no.11(June 12, 2013)
• ISSN：1944-8252

文摘

An approach to fabricate Ba_0.5Sr_0.5TiO₃ (BST) films with a preferred orientation on a glass substrate by pulsed laser deposition was developed. To ensure a preferred crystallographic orientation, we utilized a molecularly thin Ca₂Nb₃O₁₀ perovskite nanosheet as a seed layer and successfully fabricated BST films with a nearly perfect (100)-axis orientation. The 100 nm films after annealing at 450 掳C in air showed a good dielectric performance (蔚_r > 400), which was comparable to the 蔚_r value of epitaxially grown films with the same thickness. These results indicate that the nanosheet seed layer plays a crucial role in controlled film growth, realizing a nearly intrinsic performance of BST.

Keywords:

nanosheet; seed layer; Ba_1鈭?i>xSr_xTiO₃; thin-film growth; dielectrics