This paper reports on the epitaxial growth of Li3xLa2/3鈥?i>xTiO3 thin films by means of pulsed laser deposition and their transport properties. A series of films obtained in this study have revealed that the thin film quality and Li-ion conductivity are highly sensitive to growth conditions as well as target composition. The epitaxial thin films are mostly c-axis oriented, containing a small amount of a-axis domains and antiphase boundaries. In-plane conductivity measurements investigating the relationship between these defects and Li-ion conductivity in Li3xLa2/3鈥?i>xTiO3 show that the defects are not predominantly resistive against the ionic conduction.